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Forming self-aligned contacts on pillar structures — devreal.ai

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Forming self-aligned contacts on pillar structures

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inventor_of · incomingAnthony Annunziataperson ↗

02

Provenance

Type: patent
Status: Imported / unclaimed
source: bythebay
pdf_url: https://patentimages.storage.googleapis.com/54/a5/01/f46ec337d80c27/US10586921.pdf
assignee: International Business Machines Corporation
grant_date: 2020-03-10
filing_date: 2018-06-28
patent_number: US10586921B2